Silicon Carbide Wafer Cutting Process Overview
published on 2025-04-24
Silicon carbide (SiC), as a third-generation semiconductor material, plays a crucial role in power electronics and high-frequency applications due to its excellent physical and chemical properties. However, the extreme hardness, high thermal resistance, and chemical inertness of SiC make its processing highly challenging, especially in wafer cutting. Efficient and precise wafer cutting is essential to ensuring the performance of SiC devices. This article provides an in-depth introduction to several mainstream SiC wafer cutting processes, analyzing their advantages, disadvantages, and applicable scenarios.
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