The Impact of Defects on Silicon Carbide (SiC) Substrates in Various Applications
published on 2025-04-24
Abstract Silicon carbide (SiC) substrates are critical for high-power and high-frequency electronic devices, as well as optoelectronic applications. However, the presence of defects, often referred to as "birthmarks," can significantly impact their performance and reliability. This paper explores the causes of these defects and their effects on the mechanical, electrical, thermal, and optical properties of SiC substrates. The necessity of stringent control over the production processes to minimize these defects is also discussed.
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