Why Silicon Face is Preferred over Carbon Face in SiC Epitaxial Growth?
published on 2025-04-24
Silicon carbide (SiC), as a wide-bandgap semiconductor material, is highly valued for its exceptional performance in high-power, high-frequency, and high-temperature electronic devices. During SiC epitaxial growth, the silicon face (Si-face) is typically chosen over the carbon face (C-face) as the growth surface. This preference is not incidental but is based on the significant differences in the physicochemical properties of the two surfaces, with Si-face epitaxy better meeting the industrial requirements for high-quality epitaxial layers. This article systematically discusses the reasons behind this choice from the perspectives of surface energy and chemical activity, epitaxial growth rate, surface morphology and crystal defects, interface properties, and industrial practice.
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