When it comes to silicon carbide (SiC) wafer materials, the 4H-HPSI type of silicon carbide stands out for its exceptional material characteristics and its wide range of applications in the semiconductor industry. As a third-generation semiconductor materials expert, JXT Technology Co., Ltd. (https://www.jxtwafer.com/) will provide a detailed overview of the characteristics, advantages, and applications of 4H-HPSI silicon carbide.
1.Properties of 4H-HPSI Silicon Carbide wafer
Crystal Structure:Hexagonal
Lattice Constant: a=3.076 Å c=10.053 Å
Density: 3.21 g/cm3
Melting point: 2830℃
Mohs Hardness:≈9.2 mohs
Dielectric Constant: c~9.66
Band Gap: 3.23 eV
Breakdown Electrical Field: 3-5×106V/cm
Thermal Conductivity: a~4.9 W/cm·K@298K , c~3.9 W/cm·K@298K
Thermal Expansion: 4-5×10-6/K
Refractive Index@750nm:no = 2.61 ne = 2.66
2. Specification of 4H-HPSI Silicon Carbide wafer
Diameter:50.8mm/100mm/150mm
Thickness: 500μm
Surface Orientation: On Axis:{0001} ± 0.2°
Primary Flat Orientation: Parallel to <11-20>±1°
Primary Flat Length: 16mm/32.5mm/47.5mm/Notch
Resistivity: ≥1E7Ω.cm
Front Surface Finish: Si-Face:CMP,Ra<0.5nm
Back Surface Finish: C-Face:Optical Polish,Ra<1nm
Laser Mark: Back side(C-Face)
TTV: 10-20μm
BOW: 25-60μm
WARP:30-80μm
3. Applications of 4H-HPSI Silicon Carbide Wafer
Power Electronics: 4H-HPSI silicon carbide is widely used in manufacturing power switch devices for grid applications, electric vehicle chargers, and industrial power applications, thanks to its high-temperature performance and high-voltage tolerance.
Communication: In high-frequency applications, 4H-HPSI silicon carbide is employed to manufacture radio frequency power amplifiers, antennas, microwave equipment, and more, providing higher efficiency and performance.
Optoelectronics: 4H-HPSI silicon carbide finds application in manufacturing photodiodes and laser diodes, meeting the requirements of communication, laser radar, and medical equipment, among other fields.
Sensors: Given its exceptional performance, 4H-HPSI silicon carbide has significant potential in high-temperature sensor manufacturing for industrial and automotive applications.
In summary, 4H-HPSI silicon carbide is a versatile material, distinguished by its unique material characteristics, outstanding advantages, and its wide range of applications in the semiconductor industry. Whether in high-temperature, high-voltage electronic devices, communication, or sensor applications, this material provides robust support for innovation in various fields.
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