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Specifications of 8 inch N-type SiC Double-side Polished Substrate-we are an outstanding supplier of silicon carbide materials

published on 07 Apr 2024

The 8-inch N-type SiC double-side polished substrate is a silicon carbide wafer with a diameter of 8 inches (approximately 200 millimeters), processed through double-side polishing to achieve high flatness and smoothness, utilized in the manufacturing of high-power electronic devices such as power MOSFETs, Schottky diodes, and high-frequency RF devices due to its excellent material properties for efficient and reliable applications.


                                         Specifications of  8 inch N-type SiC Double-side Polished Substrate

Items
UnitUltra-P

ProductionDummy
                                                                                          Boule Parameters
Polytype--                                          4H
Surface orientation error                                4°toward<11-20>±0.5°
                                                                                         Electrical Parameters
Dopant--                                 n-type Nitrogen
Resistivityohm.cm                                 0.015~0.025ohm.cm                    NA
                                                                                         Mechanical Parameters
Diametermm                                 200.0±0.2mm
Thicknessμm                                 350/500±25μm
Notch orientation                                 [1-100]±5
Notch Depthmm                                 1~1.5mm
LTVμm≤3μm(10mm*10mm)≤5μm(10mm*10mm)≤15μm(10mm*10mm)
TTVμm≤7μm≤10μm≤20μm
Bowμm-20μm~20μm-25 μm~25μm-65μm~65μm
Warpμm≤30μm≤35μm≤70μm

Front(Si-face)Roughness(AFM)

nm
                                Ra≤0.2nm
                                                                                        Structure
Micropipe densityea/cm²<0.2ea/cm²<2ea/cm²≤50ea/cm²
Metal impuritiesatoms/cm≤1E11atoms/cm²(Al, Cr, Fe,Ni, Cu, Zn, Pb, Na, K, Ti, Ca,V, Mn)
TSDea/cm²≤200ea/cm²≤500ea/cm²NA
 BPDea/cm²≤1000ea/cm²≤2000ea/cm²NA
TEDea/cm²≤3000ea/cm²≤7000ea/cm²NA
                                                                                       Front Quality
FrontSi

Surface 

Finish

Si - CMP Si-face CMP 
Particlesea/wafer≤60(size≥0.3μm)≤100(size≥0.3μm)NA
Scratchesea/mm<5,Totallength≤1/2*Diameter<5,Totallength≤DiameterNA
Edge chips/indents/cracks/stains/contamination--                None

Polytype area

--                None

Front laser 

marking

--                None
                                                                                      Back Quality
Back finish--               C-face polished
Scratchesea/mm               ≤5,Total Length≤Diameter
Back defects (edge chips/indents)--               None
NA

Back roughnessnm       Ra≤5nm

Back laser 

marking

--               Notch

                                                                                                     Edge
Edge--              Chamfer
                                                                                                     Packaging
Packaging--              Epi-ready with vacuum packaging
Packaging--             Multi-wafer or single wafer cassette packaging




















































As an outstanding supplier of silicon carbide substrates, JXT TECHNOLOGY is committed to providing high-quality SiC materials.With advanced manufacturing processes and stringent quality control standards, we ensure our products exhibit excellent flatness and surface smoothness. As a supplier of silicon carbide materials, we focus on meeting customer demands and providing crucial support to the high-power electronic device manufacturing industry.

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